Use of BiFeO3 layer as a dielectric in MOS based radiation sensors fabricated on a Si substrate

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Tarih

2014

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Elsevier Science Bv

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

The possible usage of BiFeO3 (bismuth ferrite) in MOS (metal-oxide-semiconductor) based radiation sensors was studied. Gamma radiation effects on the electrical characteristics of BiFeO3 MOS capacitors were investigated in detail. BiFeO3 thin films were deposited on p (100)-type silicon wafers with a thickness of 300 nm by magnetron sputtering. To examine their gamma irradiation response over a range of doses, the fabricated MOS capacitors were irradiated using a Co-60 gamma source from 0.5 to 16 Gray at a dose rate of 0.0030 Gy/s. Capacitance-Voltage measurements were recorded prior to and after irradiation and the effects of radiation were determined from the mid-gap and flat-band voltage shifts. The results show that BiFeO3 has a good response to gamma irradiation and can be used as a new material for future dielectric applications such as radiation sensors. (C) 2013 Elsevier B.V. All rights reserved.

Açıklama

Anahtar Kelimeler

Multiferroic BiFeO3 MOS capacitors, Interface States, Oxide Trapped Charges, Multiferroic Radiation Sensors

Kaynak

Nuclear Instruments & Methods In Physics Research Section B-Beam Interactions With Materials And Atoms

WoS Q Değeri

Q2

Scopus Q Değeri

Q2

Cilt

319

Sayı

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