Fabrication and characterization of resistance temperature detector by smart mask design

Basit Öğe Kaydı
dc.authorid0000-0003-3909-2662en_US
dc.authorid0000-0002-6652-4662en_US
dc.contributor.authorLök, Ramazan
dc.contributor.authorKaraçalı, Hüseyin
dc.contributor.authorVarol, Ali
dc.contributor.authorÇamlı, Uğur
dc.contributor.authorYılmaz, Ercan
dc.date.accessioned2023-09-14T10:42:52Z
dc.date.available2023-09-14T10:42:52Z
dc.date.issued2022en_US
dc.departmentBAİBÜ, Rektörlük, Nükleer Radyasyon Dedektörleri Uygulama ve Araştırma Merkezien_US
dc.descriptionScientific and Technological Research Council of Turkey (TUBITAK)(Turkiye Bilimsel ve Teknolojik Arastirma Kurumu (TUBITAK)); Arcelik A.S under TEYDEB; Presidency of Turkey, Presidency of Strategy and Budgeten_US
dc.description.abstractThe purpose of this study is to give detailed information about fabrication and characterization of resistance temperature detector by smart mask design. The effects of annealing on both structural and electrical properties were investigated. Changes in microstrain, lattice parameter and grain size values were observed by means of annealing. It has been shown that the structural changes cause a decrease in resistivity and sheet resistance values. Thousands of sensors can be fabricated according to the substrate size of thin film RTD produced. It is almost impossible to fabricate thousands of sensors with the same resistance value. But by the agency of the smart mask design proposed in this study, it is possible to adjust each RTD to the same resistance value by using the resistance adjustment points. Maximum TCR value was found to be around 3.98 × 10–3 at 0 0C. This value is very close to the standard TCR value 3.90 × 10–3 at 0 0C used for industrial applications.en_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK); Arcelik A.S under TEYDEB [1505, 5170059]; Presidency of Turkey, Presidency of Strategy and Budget [2016K12-2834]en_US
dc.identifier.citationLok, R., Karacali, H., Varol, A., Camli, U., & Yilmaz, E. (2022). Fabrication and characterization of resistance temperature detector by smart mask design. The International Journal of Advanced Manufacturing Technology, 122(1), 147-158.en_US
dc.identifier.doi10.1007/s00170-022-09041-2
dc.identifier.endpage158en_US
dc.identifier.issn0268-3768
dc.identifier.issn1433-3015
dc.identifier.scopus2-s2.0-85126545293en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage147en_US
dc.identifier.urihttp://dx.doi.org/10.1007/s00170-022-09041-2
dc.identifier.urihttps://hdl.handle.net/20.500.12491/11700
dc.identifier.volume122en_US
dc.identifier.wosWOS:000770545200005en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.institutionauthorLök, Ramazan
dc.institutionauthorKaraçalı, Hüseyin
dc.institutionauthorYılmaz, Ercan
dc.language.isoenen_US
dc.publisherSpringer London Ltden_US
dc.relation.ispartofThe International Journal of Advanced Manufacturing Technologyen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.relation.tubitakScientific and Technological Research Council of Turkey (TUBITAK); Arcelik A.S under TEYDEB [1505, 5170059]; Presidency of Turkey, Presidency of Strategy and Budget [2016K12-2834]
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectResistivityen_US
dc.subjectPt Thin Filmen_US
dc.subjectRTDen_US
dc.subjectMicrostrainen_US
dc.subjectMicrostructureen_US
dc.titleFabrication and characterization of resistance temperature detector by smart mask designen_US
dc.typeArticleen_US

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