MALTA-Cz: a radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrate

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dc.authorid0000-0003-1570-0344en_US
dc.contributor.authorPernegger, H.
dc.contributor.authorAllport, P.
dc.contributor.authorBerlea, D. V.
dc.contributor.authorBirman, A.
dc.contributor.authorBortoletto, D.
dc.contributor.authorDenizli, Haluk
dc.date.accessioned2024-05-09T12:52:24Z
dc.date.available2024-05-09T12:52:24Z
dc.date.issued2023en_US
dc.departmentBAİBÜ, Fen Edebiyat Fakültesi, Fizik Bölümüen_US
dc.descriptionWe are grateful to the Institute Jo & zcaron;ef Stefan, Ljubljana, Slovenia, for their support during neutron irradiations. The irradiation campaign has been supported by the H2020 project AIDA-2020, GA no. 654168. This research project has received funding by the Marie Sklodowska-Curie Innovative Training Network of the European Commission Horizon 2020 Programme under contract number 675587 STREAM.en_US
dc.description.abstractDepleted Monolithic Active Pixel Sensor (DMAPS) sensors developed in the Tower Semiconductor 180 nm CMOS imaging process have been designed in the context of the ATLAS ITk upgrade Phase-II at the HL-LHC and for future collider experiments. The "MALTA-Czochralski (MALTA-Cz)" full size DMAPS sensor has been developed with the goal to demonstrate a radiation hard, thin CMOS sensor with high granularity, high hit-rate capability, fast response time and superior radiation tolerance. The design targets radiation hardness of > 10(15) (1 MeV) n(eq)/cm(2) and 100 Mrad TID. The sensor shall operate as tracking sensor with a spatial resolution of approximate to 10 mu m and be able to cope with hit rates in excess of 100 MHz/cm(2) at the LHC bunch crossing frequency of 40 MHz. The 512 x 512 pixel sensor uses small collection electrodes (3.5 mu m) to minimize capacitance. The small pixel size (36.4 x 36.4 mu m(2)) provides high spatial resolution. Its asynchronous readout architecture is designed for high hit-rates and fast time response in triggered and trigger-less detector applications. The readout architecture is designed to stream all hit data to the multi-channel output which allows an off-sensor trigger formation and the use of hit-time information for event tagging.The sensor manufacturing has been optimised through process adaptation and special implant designs to allow the manufacturing of small electrode DMAPS on thick high-resistivity p-type Czochralski substrate. The special processing ensures excellent charge collection and charge particle detection efficiency even after a high level of radiation. Furthermore the special implant design and use of a Czochralski substrate improves the sensor's time resolution. This paper presents a summary of sensor design optimisation through process and implant choices and TCAD simulation to model the signal response. Beam and laboratory test results on unirradiated and irradiated sensors have shown excellent detection efficiency after a dose of 2 x 10(15) 1 MeV n(eq)/cm(2). The time resolution of the sensor is measured to be sigma = 2 ns.en_US
dc.description.sponsorshipH2020 project AIDA-2020 [654168]; Marie Sklodowska-Curie Innovative Training Network of the European Commission Horizon 2020 Programme [675587]en_US
dc.identifier.citationPernegger, H., Allport, P., Berlea, D. V., Birman, A., Bortoletto, D., Buttar, C., ... & Zoubir, A. M. (2023). MALTA-Cz: A radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrate. Journal of Instrumentation, 18(09), P09018.en_US
dc.identifier.doi10.1088/1748-0221/18/09/P09018
dc.identifier.endpage21en_US
dc.identifier.issn1748-0221
dc.identifier.issue9en_US
dc.identifier.scopus2-s2.0-85173135674en_US
dc.identifier.scopusqualityQ2en_US
dc.identifier.startpage1en_US
dc.identifier.urihttp://dx.doi.org/10.1088/1748-0221/18/09/P09018
dc.identifier.urihttps://hdl.handle.net/20.500.12491/12138
dc.identifier.volume18en_US
dc.identifier.wosWOS:001108188900003en_US
dc.identifier.wosqualityQ3en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.institutionauthorDenizli, Haluk
dc.language.isoenen_US
dc.publisherIOP Publishing Ltden_US
dc.relation.ispartofJournal of Instrumentationen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectDetector Modelling and Simulations II (Electric Fields, Charge Transport, Multiplicationand Induction, Pulse Formation, Electron Emission, Etc)en_US
dc.subjectParticle Tracking Detectors (Solid-Statedetectors)en_US
dc.subjectRadiation-Hard Detectors Soliden_US
dc.subjectState Detectorsen_US
dc.subjectComputational Analysisen_US
dc.subjectDamageen_US
dc.titleMALTA-Cz: a radiation hard full-size monolithic CMOS sensor with small electrodes on high-resistivity Czochralski substrateen_US
dc.typeArticleen_US

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