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Öğe Influence of sidewall grating etching depth on GaN-based distributed feedback laser diodes(Iop Publishing Ltd, 2024) Feng, Meixin; Li, Chuanjie; Tang, Yongjun; Liu, Jianxun; Sun, Xiujian; Liu, Qifa; Yilmaz, ErcanConventional sidewall gratings in GaN-based distributed feedback (DFB) laser diodes (LD) have a thick p-type layer, which may cause current spreading and carrier-induced anti-guiding effects, severely deteriorating the lasers performance. In this study, we report a novel fabrication technology to not only reduce the remaining p-type layer in the sidewall gratings but also realize close-coupled sidewall gratings. Afterwards, we further investigate the influence of the sidewall gratings etching depth on GaN-based DFB LDs. The results show an almost unchanged current injection efficiency, nearly coincided I-V curve and a near-field emission width for shallow etched structures, which indicate that the current spreading is neglectable in GaN-based ridge structure LDs. Based on this analysis, GaN-on-Si DFB LDs with an emission wavelength of 414 nm, full width at half maxima of 22 pm, and side mode suppression ratio of 19.1 dB were realized.Öğe Performance improvement of GaN-based microdisk lasers by using a PEALD-SiO2 passivation layer(Optica Publishing Group, 2023) Zhao, Hanru; Feng, Meixin; Liu, Jianxun; Sun, Xiujian; Li, Yongjian; Yılmaz, ErcanDry-etching is often utilized to shape GaN-based materials. However, it inevitably causes plenty of sidewall defects as non-radiative recombination centers and charge traps that deteriorate GaN-based device performance. In this study, the effects of dielectric films deposited by plasma-enhanced atomic layer deposition (PEALD) and plasma-enhanced chemical vapor deposition (PECVD) on GaN-based microdisk laser performance were both investigated. The results demonstrated that the PEALD-SiO2 passivation layer largely reduced the trap-state density and increased the non-radiative recombination lifetime, thus leading to the significantly decreased threshold current, notably enhanced luminescence efficiency and smaller size dependence of GaN-based microdisk lasers as compared with the PECVD-Si3N4 passivation layer.Öğe Ultrahigh-responsivity ultraviolet photodetectors based on AlGaN/GaN double-channel high-electron-mobility transistors(American Chemical Society, 2023) Wang, Haodong; Feng, Meixin; Zhong, Yaozong; Chen, Xin; Gao, Hongwei; Yılmaz, Ercan; Sun, QianIn this work, high-performance ultraviolet (UV) photodetectors (PDs) based on an AlGaN/GaN double-channel high-electron-mobility transistor (HEMT) were fabricated and investigated using 360 nm illumination. The design of the novel device structure introduces double two-dimensional electron gas channels, which remarkably improve the effectiveness in the collection of photo generated carriers and make it work as a two-terminal normally off device. The device exhibited a high responsivity of 2.1 x 10(7) A/W and a high specific detectivity of 1.7 x 10(15) Jones under the illumination of 9.7 mu W/cm(2), indicating the excellent capability of detecting an ultraweak signal. Meanwhile, a distinguished transient performance was also observed when it operated under 500 Hz pulse illumination. Combining fabrication conciseness and outstanding performance advantages, the proposed AlGaN/GaN double-channel HEMT UV PD shows promising potential in the development of next-generation UV PDs.