ANNEALING TEMPERATURE EFFECTS ON SURFACE MORPHOLOGY AND OPTICAL PROPERTIES OF IGZO THIN FILMS PRODUCED BY THERMAL EVAPORATION

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dc.contributor.authorAltinkök, Atılgan
dc.contributor.authorOlutaş, Murat
dc.date.accessioned2024-09-25T20:23:37Z
dc.date.available2024-09-25T20:23:37Z
dc.date.issued2020
dc.departmentAbant İzzet Baysal Üniversitesien_US
dc.description.abstractThe use of Transparent Conductive Oxide (TCO) thin films in technologyhas increased in the last decades. These materials have good electricalconductivity visible light transmittance simultaneously. TCOs have manytechnology applications such as thin film transducers (TFTs), conductiveelectrodes, capacitors, sensors, electrochemical devices. Although indiumtin oxide (ITO) is the most common semiconductor among these materials,studies on N-type indium-gallium-zinc oxide (IGZO) that better electricalproperties (electron mobility µFE>10 cm2/V.s) cm2/ Vs) have increased inrecent years. In this study, IGZO thin films are produced which have a veryhomogeneous amorphous structure via using thermal evaporation system onglass substrates. Structural characterization was carried out by atomicforce microscopy and scanning electron microscopy on IGZO thin films forvarious thickness and annealing temperatures. Transmittance and thicknessmeasurements were performed using UV-VIS spectroscopy and profilometer for the investigation of optical properties, respectively. It is seen that grainsize grows and grain boundaries decreases when annealing temperature isincreased. This results in reduced roughness and increased opticaltransmittance and energy gap (Eg).en_US
dc.identifier.endpage44en_US
dc.identifier.issn1304-2025
dc.identifier.issue1en_US
dc.identifier.startpage25en_US
dc.identifier.trdizinid371823en_US
dc.identifier.urihttps://search.trdizin.gov.tr/tr/yayin/detay/371823
dc.identifier.urihttps://hdl.handle.net/20.500.12491/16018
dc.identifier.volume16en_US
dc.indekslendigikaynakTR-Dizinen_US
dc.language.isoenen_US
dc.relation.ispartofJournal of Naval Sciences and Engineeringen_US
dc.relation.publicationcategoryMakale - Ulusal Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.snmzYK_20240925en_US
dc.titleANNEALING TEMPERATURE EFFECTS ON SURFACE MORPHOLOGY AND OPTICAL PROPERTIES OF IGZO THIN FILMS PRODUCED BY THERMAL EVAPORATIONen_US
dc.typeArticleen_US

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